MEMS/NEMS based on mono-, nano-, and
2014-6-12 · The realization of thin NCD films with a Young’s modulus equal to that of bulk diamond (1100 GPa)16 has led to heightened research activity in high-frequency MEMS/NEMS both from a fundamental research point of view as well as for commercial applications. MEMS and NEMS resonators find application in areas as diverse as the filters and timing oscillators in wireless communications to the ...
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