MEMS/NEMS based on mono-, nano-, and
2014-6-12 · This article discusses a few examples of MEMS and NEMS devices that have been fabricated using mono-, nano-, and ultrananocrystalline diamond films as well as their performance. Diamond, because of its unique physical, chemical, and electrical properties and the feasibility of growing it in thin-film form, is an ideal choice as a m
Get Price